Thermal Conductivity Sensors

The XEN-TCG3880 thermal conductivity gauge measures thermal conductivity of the surrounding gas. Operating on the principle that gases differ in their thermal conductivity, it can be used to measure gas concentration in binary mixture or quasi-binary mixture where component gases have different thermal conductivity. It can also be used as a Pirani gauge to measure pressure in vacuum systems.

The sensor chip consists of a silicon rim with a silicon-nitride membrane. In the center is a heater, with a sensor element measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane.

Application notes

Vacuum measurement

The Thermal Conductivity Sensor XEN-TCG3880 comes in various versions:
  • with or without Pt100/Pt1000 temperature sensor.
  • with or without welded cap. 
  • with or without extra cover against flow.
  • in various housings, etc.

Brochure XEN-TCG3880

Datasheet XEN-TCG3880